کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / هفتمین کنفرانس بین المللی میکروالکترونیک ایران

Graphene-Based Ring Resonator Ammonia Sensor: Design Optimization for Maximum Sensitivity and Q-Factor

نویسندگان :

Raheleh Masoumi¹ Manouchehr Bahrami²

1- دانشگاه تبریز 2- دانشگاه تبریز

کلمات کلیدی :

Ammonia gas detection،Graphene،Graphene Based Sensors،Optical Ring Resonators،Ring Resonator Sensor،Graphene Based Ring Resonator،Photonic sensor design

چکیده :

This paper presents the design and optimization of a graphene-based optical ring resonator sensor for the detection of ammonia (NH₃) gas. A silicon ring waveguide coated with graphene, integrated on a silica substrate using a silicon-on-insulator (SOI) wafer, is employed. The adsorption of ammonia molecules onto the graphene layer leads to changes in its refractive index, resulting in measurable variations in the transmission intensity of the resonator.Simulations were carried out using Lumerical and MATLAB to evaluate key performance metrics. The effects of varying the ring radius and the coupling gap were systematically investigated. The results show that increasing the ring radius and decreasing the coupling gap lead to enhanced sensitivity and Quality factor (Q), while the Free Spectral Range (FSR) remains nearly unchanged. The optimal configuration—featuring a 6.675 µm ring radius and a 50 nm coupling gap—was identified, achieving high sensitivity for ammonia concentrations ranging from 0.5 ppm to 10 ppm. The proposed sensor is CMOS-compatible and offers promising potential for compact, low-cost, and high-performance gas sensing applications.