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پنجمین کنفرانس بین المللی میکروالکترونیک ایران
ZnO-Based Surface Acoustic Wave Droplet Sensor
نویسندگان :
Farzaneh Soleimanpour
1
Behdad Barahimi
2
Sara Darbari
3
Mohammad kazem Moravvej farshi
4
1- دانشگاه تربیت مدرس
2- دانشگاه تربیت مدرس
3- دانشگاه تربیت مدرس
4- دانشگاه تربیت مدرس
کلمات کلیدی :
Surface Acoustic Wave (SAW)،sensor،piezoelectric،SAW Device،Zinc Oxide (ZnO)
چکیده :
In this work we designed and fabricated a ZnO based SAW sensor with focused aluminum IDTs for DI wate droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.
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بیشتر
ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 44.5.0
