کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / ششمین کنفرانس بین المللی میکروالکترونیک ایران

Influence of piezoelectric actuator on the stability of micromechanical device via Casimir force

نویسندگان :

Fatemeh Mahdi Maleki¹ Fatemeh Tajik²

1- دانشگاه الزهرا(س) 2- دانشگاه الزهرا(س)

کلمات کلیدی :

Casimir force،MEMS،Piezoelectric،Stiction

چکیده :

Here, we investigate dynamical actuation of a microswitch under the influence of the Casimir force via a piezoelectric actuator. In fact, we have considered the effect of optical properties on the stable operation of the microswitch for both good (e.g. metals) and poor conductors via a piezoelectric actuator. Indeed, gold (Au) has been chosen as a good conductor which is widely used for Casimir force measurements, and highly doped conductive silicon carbide (SiC) has been considered as a poor conductor which is a promising material for device operating under harsh environments. It is also supposed that the microswitches are frictionless and autonomous. Using bifurcation and the phase portraits of the actuation dynamics, it has been analyzed to compare the sensitivity of device operating between materials with conductivities. Moreover, pull-in diagrams have shown that there is significant dependence of the performance of the microswitches on the in-plane extension in the piezoelectric actuator, due to applied voltage. The latter can preserve stability or lead to instability and stiction in both microswitches made from Au and SiC.