کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / هفتمین کنفرانس بین المللی میکروالکترونیک ایران

Design of Silicon Nitride Slot Waveguide for Methane Gas Sensing in the Mid-infrared Region

نویسندگان :

Maryam Mirzalou¹ Faezeh Bahrami-Chenaghlou² Afshin Ahamdpour³ AmirMasoud Taheri⁴

1- دانشگاه صنعتی سهند تبریز 2- دانشگاه صنعتی سهند تبریز 3- دانشگاه صنعتی سهند تبریز 4- دانشگاه صنعتی سهند تبریز

کلمات کلیدی :

Optical mode analysis،Sensitivity،Gas Sensor،Slot waveguide،Silicon nitride

چکیده :

This paper presents the systematic design and accurate analysis of an optical gas sensor based on the silicon nitride slot waveguide for methane sensing. According to single-mode operation and appropriate mode confinement criteria, the cross-section dimensions of the waveguide have been designed, which are equal to 1.159 × 2 µm² and 0.709 × 2 µm² for the fundamental guided TE and TM modes, respectively. To investigate the optical performance of the proposed waveguide, the three-dimensional finite-difference time-domain (3D-FDTD) method has been used, and its optical characteristics have been obtained for both polarizations. Then, the sensing performance of the structure for methane detection at a wavelength of 3.315 µm has been evaluated. In this regard, important parameters, such as sensitivity, optimum length of the sensing region, and minimum detectable concentration, have been studied considering the propagation loss of 3 dB/cm. Based on the obtained results, the slot waveguide-based optical sensor has promising performance for methane gas detection.