کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / ششمین کنفرانس بین المللی میکروالکترونیک ایران

Study of Nanoscale Material NEMS Resonant Pressure Sensors: Simulation and Comparison

نویسندگان :

Amir Noroolahi¹ Abolfazl Hosseini²

1- دانشگاه آزاد اسلامی واحد یادگار امام خمینی(ره) شهرری 2- دانشگاه آزاد اسلامی واحد یادگار امام خمینی(ره) شهرری

کلمات کلیدی :

nanoscale Material،Resonant Frequency،Pressure Sensor،Nanoelectromechanical Systems (NEMS

چکیده :

In this manuscript, we offer a comprehensive investigation of the operational principle, performance assessment, and prospects of resonant pressure sensors that rely on nanoscale material membranes. The membrane possesses a radius of 2500 nm and a thickness of 25 nm. Our simulation setup consists of a multi-layer 2D-dimensional materials membrane suspended on a Si substrate and stimulated by an electrostatic excitation. When acting as a resonator, the membrane displays a frequency shift in different materials of roughly 56~82 MHz in response to pressures ranging from zero to 100 kPa applied pressure. Our sensor exhibits a sensitivity of 556 Hz/Pa (WS2) ~763 Hz/Pa (h-BN). The results demonstrate that the maximum sensitivity belongs to h-BN which is 300 times higher than that of a silicon-based resonant pressure sensor, despite employing a membrane area that is 1200 times smaller. Our proposed pressure sensor exploits the mechanical and electrical properties of 2D materials to enable exceptionally accurate pressure measurements.

لیست مقالات

لیست مقالات بایگانی شده

Design of a Compact Approximate Multiplier in QCA Technology Using a Three-Layer Architecture

Saeid Seyedi - Hatam Abdoli

A 12-bit, 100-MS/s Two-Channel Time-Interleaved SAR ADC with a Novel Offset Error Cancellation Method

Seyed Kian Mousavikia - Majid Vatan Parast Aghdami - Morteza Mousazadeh - Khayrollah Hadidi

طراحی و شبیه سازی یک حسگر جیوه برپایه سیستم های میکروالکترومکانیکی برای کاربردهای صنعتی

رضا حاجی آقایی وفایی - مهناز مهدی پور

A Compact Biomedical MIM Plasmonic Refractive Index Sensor with Structurally Defective Nano-Islands for Electrolyte Detection

Mohammad Ghanavati - Mardin Rostampour - Mohammad Azim Karami

High Figure of Merit Metasurface Biosensor at Optical Telecommunication Band

Hemin Ebrahimi - Keyhan Hosseini - Mohammad Razaghi

Electrically-Driven Tunable Acoustic Fields for Acoustofluidic Particle Manipulation

Elahe Hosseini - Behdad Barahimi - Sara Darbari - Iman Halvaei - Mohammad Kazem Moravvej-Farshi

Evaluation of Run-Time Energy Efficiency using Controlled Approximation in a RISC-V Core

Arvin Delavari - Faraz Ghoreishy - Hadi Shahriar Shahhoseini - Sattar Mirzakuchaki

مراحل طراحی سیستماتیک یک Continuous Time Pipelined ADC

هادی نبی زاده - مرتضی موسی زاده

A 5.5 GHz LNA for Wi-Fi7 Application in IEEE 802.11be Standard

Elaheh Pakravan - SIROUS TOOFAN - Jafar Sobhi - Reza Daie Kouzehkanani

Numerical Modeling and Simulation of High Sensitivity Photonic Crystal Fiber Optical Sensors

Ali Asghar Molavi Choobini - Farkhonde Zamaninejad - Sara Sadat Ghaffari-Oskooei

بیشتر