کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / هفتمین کنفرانس بین المللی میکروالکترونیک ایران

A Verilog-A Based Dynamic Model for MEMS Accelerometer Sensors

نویسندگان :

Kamyab Karimi Sarableh¹ Farshad Gozalpour² Sepehr Zare Teimoori³ Rasoul Fathipour⁴

1- دانشگاه صنعتی امیرکبیر 2- دانشگاه صنعتی امیرکبیر 3- دانشگاه صنعتی خواجه نصیرالدین طوسی 4- دانشگاه صنعتی امیرکبیر

کلمات کلیدی :

Accelerometer،Verilog-A model،COMSOL،electrostatic force،rest-state capacitance،scale factor

چکیده :

In this paper, a Verilog-A model is proposed for simulation and investigation of the accelerometer sensors. This model is capable of simulating and monitoring most of the sensor key-parameters such as gain, noise, electrostatic force, displacement, time and frequency response. The main goal of this model is to examine and simulate the sensor, along with the readout chip. Given that many sensor characteristics, such as scale factor and rest-state capacitance, affect the performance of readout chip, it would be very useful to use a sensor model that dynamically represents these characteristics. Also, simulations are very time-consuming in COMSOL, but would be done quickly using the proposed model. Using the proposed Verilog-A model, the rest-state capacitance, mechanical scale factor, and sensor resonance frequency have been investigated, which in comparison with COMSOL results, have -2.15 %, 1.3 % and 7.9 % of errors, respectively, Therefore, this model is suitable for dynamic simulations, as well as self-testing and system-level design.