کنفرانس بین المللی میکروالکترونیک ایران

صفحه اصلی / ششمین کنفرانس بین المللی میکروالکترونیک ایران

Unified Modeling Framework for Dynamic Analysis of a MEMS Resonant Biosensor

نویسندگان :

Ali Selk Ghafari¹

1- دانشگاه صنعتی شریف - پردیس بین الملل

کلمات کلیدی :

MEMS،biosensor،resonant،modeling

چکیده :

Utilizing mathematical modeling is crucial in comprehending and foreseeing the actions of MEMS components, reducing time and expenses in their creation. Modeling and simulating MEMS structures and physical phenomena is difficult because of their complexity. The research goal is to suggest a comprehensive modeling framework using bond graph method for MEMS biosensors, enabling the prediction of device performance and validation of characteristics prior to manufacturing. Simulation results are in good agreement with the experimental investigation for both transient and steady state responses. This method allows for flexibility in system-level modeling by merging specific simulation outcomes to form a thorough device model.