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پنجمین کنفرانس بین المللی میکروالکترونیک ایران
حسگر فشار پیزومقاومتی مبتنی بر صفحه رزین حساس به نور
نویسندگان :
Ferdos Akrami (دانشگاه صنعتی شیراز)
کلمات کلیدی :
pressure sensor،lithography،piezoresistive
چکیده :
In this paper, we propose and fabricate a new piezoresistive pressure sensor by combining micro-structured flexo photosensitive Resin Plate/Ag and Ag interdigital electrodes through a low-cost process. These plates are made from light-sensitive polymers that are hardened by UV light. The proposed material as a flexible substrate has advantages like Excellent rebound resilience enables high-quality printing with sharp images, high resolution, Cost-effective, etc. our proposed sensor shows sensitivity (18.14 kPa-1 and 458.2 kPa-1 in the pressure range of 0 Pa to 1.2 kPa and 1.2-11 kPa), low detection limit (40 Pa), signal response (3.51 s) and recovery response (0.81 s). these characteristics allow the device to work in applications in intelligent robots, human-machine interfaces, and so forth.
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ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 34.4.5
