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پنجمین کنفرانس بین المللی میکروالکترونیک ایران
A MEMS Resonant Pressure Sensore Based on 2D Graphene Material
نویسندگان :
Amir Noroolahi (دانشگاه آزاد اسلامی واحد یادگار امام خمینی(ره) شهرری) , Farshad Babazadeh (دانشگاه آزاد اسلامی واحد یادگار امام خمینی (ره) شهر ری)
کلمات کلیدی :
2D material،Resonant Frequency،Pressure Sensor،Nanoelectromechanical systems(NEMS)،MEMS
چکیده :
In this manuscript, we offer a comprehensive investigation of the operational principle, performance assessment, and prospects of resonant pressure sensors that rely on 2D material membrane. Specifically, the membrane in question is a Graphene-based one, possessing a radius of 2500 nm and a thickness of 25 nm. Our simulation setup consists of a multi-layer Graphene membrane that suspended on a Si substrate and stimulated by an electrostatic excitation. When acting as a resonator, the membrane displays a frequency shift of roughly 57 MHz in response to pressures ranging from zero to 1 bar applied pressure. Our sensor exhibits a sensitivity of 56 kHz/mbar, which is 200 times higher than that of pressure sensors based on Silicon, despite employing a membrane area that is 1200 times smaller. Our proposed pressure sensor exploits the mechanical and electrical properties of Graphene to enable exceptionally accurate pressure measurements.
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